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BS EN ISO 14644-2:2015
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Cleanrooms and associated controlled environments-Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
洁净室和相关受控环境
BS EN ISO 14644-2:2015规定了洁净室或洁净室监测计划的最低要求
根据以下参数,通过颗粒浓度与空气清洁度相关的分区性能:
测量或影响空气中的颗粒物浓度。ISO 14644的这一部分不涉及振动或一般故障等方面的状态监测
维护工程系统。它不提供颗粒总体的监测
超出规定的下限粒径范围,0.1µm至5µm。浓度
超细颗粒(小于0.1µm的颗粒)将在单独的标准中进行说明。交叉引用:ISO 14644-1:2015ISO 14644-4:2001ISO 14644-12ISO 14644-3ISO 21501-
4:2007ISO 31000:2009购买时可用的所有当前修订版均包含在本文件的购买中。
BS EN ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean
zone performance related to air cleanliness by particle concentration, based upon parameters that
measure or affect airborne particle concentration.This part of ISO 14644 does not address condition monitoring of aspects such as vibration or general
maintenance of the engineering systems. It does not provide for monitoring of particle populations
that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of
ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.Cross References:ISO 14644-1:2015ISO 14644-4:2001ISO 14644-12ISO 14644-3ISO 21501-4:2007ISO 31000:2009All current amendments available at time of purchase are included with the purchase of this document.