IEC 62047-11:2013规定了测量长度在0.1 mm和1 mm之间、宽度在10微米和1 mm之间、厚度在0.1微米和1 mm之间的薄独立固体（金属、陶瓷、聚合物等）微机电系统（MEMS）材料线性热膨胀系数（CLTE）的试验方法，这些材料是用于MEMS的主要结构材料，微机械和其他。本试验方法适用于室温至材料熔融温度30%范围内的CLTE测量。

IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.