现行

GB/T 30656-2023

碳化硅单晶抛光片
Polished monocrystalline silicon carbide wafers

2023-03-17

现行

T/IAWBS 005-2024

6~8英寸碳化硅单晶抛光片
6~8 inch polished monocrystalline silicon carbide wafers

2024-01-12

现行

GB/T 12964-2018

硅单晶抛光片
Monocrystalline silicon polished wafers

2018-09-17

现行

T/IAWBS 027-2026

碳化硅单晶抛光片堆垛层错的测试方法
Test method for stacking fault of polished monocrystalline silicon carbide wafers

2026-06-30

现行

GB/T 47082-2026

碳化硅单晶抛光片堆垛层错测试方法
Test method for stacking faults of polished monocrystalline silicon carbide wafers

2026-01-28

现行

GB/T 29506-2013

300mm 硅单晶抛光片
300mm polished monocrystalline silicon wafers

2013-05-09

现行

SJ/T 11503-2015

碳化硅单晶抛光片表面粗糙度的测试方法
Test methods for measuring surface roughness of polished monocrystalline silicon carbide wafers

2015-04-30

现行

T/IAWBS 026-2026

碳化硅单晶切割片
Monocrystalline silicon carbide as-cut wafers

2026-07-07

现行

GB/T 32278-2025

碳化硅单晶片厚度和平整度测试方法
Test method for thickness and fltaness of monocrystalline silicon carbide wafers

2025-08-01

现行

SJ 21122-2016

PVTSiC76SI1-BP01型碳化硅单晶抛光片规范
Specification for polished mono-crystalline silicon carbide wafers of PVTSiC76SI1-BP01

2016-01-19

现行

SJ 21441-2018

SiC-HPSI型高纯半绝缘碳化硅单晶片规范
Specification for high purity semi-insulating silicon carbide monocrystalline wafers of SiC-HPSI

2018-01-18

现行

SJ/T 11504-2015

碳化硅单晶抛光片表面质量的测试方法
Test method for measuring surface quality of polished monocrystalline silicon carbide

2015-04-30

现行

T/NXCL 45-2026

300 mm 轻掺硼直拉硅单晶抛光片
300 mm lightly boron-doped monocrystalline Czochralski silicon polished wafers

2026-06-12

现行

T/IAWBS 014-2021

碳化硅单晶抛光片位错密度的测试方法
Test method for dislocation density of silicon carbide polished wafers

2021-09-15

现行

GB/T 41325-2022

集成电路用低密度晶体原生凹坑硅单晶抛光片
Low density crystal originated pit polished monocrystalline silicon wafers for integrated circuit

2022-03-09

现行

GB/T 26065-2010

硅单晶抛光试验片规范
Specification for polished test silicon wafers

2011-01-10

现行

T/IAWBS 010-2019

碳化硅单晶抛光片表面质量和微管密度检测方法-激光散射检测法
Detection method for measuring the surface Detection method for measuring the surface quality and micropipe densityof polished monocrystalline silicon carbide wafers-Laser Scattering Method

2019-12-27

现行

T/CI 609-2024

碳化硅衬底研磨抛光工艺技术规范
Technical specification for grinding and polishing process of silicon carbide substrate

2024-11-25

现行

GB/T 43313-2023

碳化硅抛光片表面质量和微管密度的测试 共焦点微分干涉法
Test method for surface quality and micropipe density of polished silicon carbide wafers—Confocal and differential interferometry optics

2023-11-27

现行

T/IAWBS 012-2019

碳化硅单晶抛光片表面质量和微管密度测试方法 ——共焦点微分干涉光学法
Test Method for Surface Quality and Micropipe?Density?of Silicon Carbide?Single Crystal?Polishing Wafers——Confocal and Differential Interferometry Optics

2019-12-27